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《化学科学与工程前沿(英文)》 >> 2019年 第13卷 第3期 doi: 10.1007/s11705-019-1831-2

Improvement in growth yield of single-walled carbon nanotubes with narrow chirality distribution by pulse plasma CVD

. Department of Electronic Engineering, Tohoku University, Sendai 980-8579, Japan.. Japan Science and Technology Agency (JST)-PRESTO, Sendai 980-8579, Japan

录用日期: 2019-07-30 发布日期: 2019-07-30

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摘要

A pulse plasma chemical vapor deposition (CVD) technique was developed for improving the growth yield of single-walled carbon nanotubes (SWNTs) with a narrow chirality distribution. The growth yield of the SWNTs could be improved by repetitive short duration pulse plasma CVD, while maintaining the initial narrow chirality distribution. Detailed growth dynamics is discussed based on a systematic investigation by changing the pulse parameters. The growth of SWNTs with a narrow chirality distribution could be controlled by the difference in the nucleation time required using catalysts comprising relatively small or large particles as the key factor. The nucleation can be controlled by adjusting the pulse on/off time ratio and the total processing time.

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