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《工程(英文)》 >> 2018年 第4卷 第6期 doi: 10.1016/j.eng.2018.10.007

立体偏转测量系统几何参数的性能分析与评价

EPSRC Future Advanced Metrology Hub, University of Huddersfield, Huddersfield HD1 3DH, UK

收稿日期: 2018-04-26 修回日期: 2018-09-14 录用日期: 2018-10-29 发布日期: 2018-11-03

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摘要

本文提出了一种新颖的几何参数分析方法,以提高立体偏转系统的测量精度。立体偏转测量可用于获得自由曲面的三维形貌信息。基于立体偏转测量的测量系统通常由条纹显示屏、主相机和参考相机组成。立体偏转测量系统组件的布置对于实现高精度测量十分重要。本文分析和评估了立体偏转测量系统的4个几何参数:主相机与被测物体表面之间的距离、主相机光线与被测表面法线之间的角度、条纹显示屏与被测物体之间的距离,以及主相机和参考相机之间的角度。本文通过模拟和实验数据对这些几何参数对测量精度的影响进行了验证。实验结果证实了这些参数对测量精度的影响。基于本文所提出的分析方法,一个立体偏转系统被搭建并且被用于测量一个标准的凹面镜。通过与凹面镜的给定表面参数进行比较,该系统的全局测量精度可达154.2 nm。

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