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《工程(英文)》 >> 2015年 第1卷 第3期 doi: 10.15302/J-ENG-2015043

8英寸绝缘栅双极型晶体管 (IGBT) 关键技术研究

CRRC Zhuzhou Electric Locomotive Institute Co., Ltd., Zhuzhou, Hunan 412000, China

收稿日期: 2015-08-09 修回日期: 2015-08-26 录用日期: 2015-09-17 发布日期: 2015-09-30

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摘要

基于8英寸绝缘栅双极型晶体管 (IGBT) 生产线的建设,重点解决了8英寸IGBT先进工艺技术、第四代高压双扩散金属氧化物半导体 (DMOS+) IGBT技术和第五代沟槽栅IGBT技术等关键技术问题,实现了高压IGBT芯片制造从6英寸到8英寸的技术突破,自主开发的1600 A/1.7 kV与1500 A/3.3 kV IGBT模块已经被成功制造并通过考核,现已应用于轨道交通牵引系统。

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