Journal Home Online First Current Issue Archive For Authors Journal Information 中文版

2022, Volume 17, Issue 4

Abstract

Keywords

Related Research

Back to Top

Frontiers of Mechanical Engineering >> 2022, Volume 17, Issue 4 doi: 10.1007/s11465-022-0705-3

Time of flight improved thermally grown oxide thickness measurement with terahertz spectroscopy

1. Fujian Provincial Key Laboratory of Terahertz Functional Devices and Intelligent Sensing, School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China;2. Institute of Precision Instrument and Intelligent Measurement & Control, Fuzhou University, Fuzhou 350108, China;1. Fujian Provincial Key Laboratory of Terahertz Functional Devices and Intelligent Sensing, School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China;2. Institute of Precision Instrument and Intelligent Measurement & Control, Fuzhou University, Fuzhou 350108, China;1. Fujian Provincial Key Laboratory of Terahertz Functional Devices and Intelligent Sensing, School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China;2. Institute of Precision Instrument and Intelligent Measurement & Control, Fuzhou University, Fuzhou 350108, China;1. Fujian Provincial Key Laboratory of Terahertz Functional Devices and Intelligent Sensing, School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China;2. Institute of Precision Instrument and Intelligent Measurement & Control, Fuzhou University, Fuzhou 350108, China;1. Fujian Provincial Key Laboratory of Terahertz Functional Devices and Intelligent Sensing, School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China;2. Institute of Precision Instrument and Intelligent Measurement & Control, Fuzhou University, Fuzhou 350108, China;1. Fujian Provincial Key Laboratory of Terahertz Functional Devices and Intelligent Sensing, School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China;2. Institute of Precision Instrument and Intelligent Measurement & Control, Fuzhou University, Fuzhou 350108, China;1. Fujian Provincial Key Laboratory of Terahertz Functional Devices and Intelligent Sensing, School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China;2. Institute of Precision Instrument and Intelligent Measurement & Control, Fuzhou University, Fuzhou 350108, China;3. School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China;4. School of Mechanical Engineering, Ningxia University, Yinchuan 750000, China

Received: 2022-03-08 Available online: 2022-03-08
HTML7 PDF 2 Collect 0

Next Previous

Abstract

As a nondestructive testing technique, terahertz time-domain spectroscopy technology is commonly used to measure the thickness of ceramic coat in thermal barrier coatings (TBCs). However, the invisibility of ceramic/thermally grown oxide (TGO) reflective wave leads to the measurement failure of natural growth TGO whose thickness is below 10 μm in TBCs. To detect and monitor TGO in the emergence stage, a time of flight (TOF) improved TGO thickness measurement method is proposed. A simulative investigation on propagation characteristics of terahertz shows the linear relationship between TGO thickness and phase shift of feature wave. The accurate TOF increment could be acquired from wavelet soft threshold and cross-correlation function with negative effect reduction of environmental noise and system oscillation. Thus, the TGO thickness could be obtained efficiently from the TOF increment of the monitor area with different heating times. The averaged error of 1.61 μm in experimental results demonstrates the highly accurate and robust measurement of the proposed method, making it attractive for condition monitoring and life prediction of TBCs.

Related Research