Frontiers of Chemical Science and Engineering
>> 2019,
Volume 13,
Issue 3
doi:
10.1007/s11705-019-1820-5
RESEARCH ARTICLE
Low-k integration: Gas screening for cryogenic etching and plasma damage mitigation
. IMEC v.z.w., 3001 Leuven, Belgium.. GREMI/University of Orleans, Orleans, France.. Air Liquide Laboratories, Tsukuba, Japan
Accepted: 2019-07-25
Available online: 2019-07-25
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Abstract
The integration of porous organo-silicate low- materials has met a lot of technical challenges. One of the main issues is plasma-induced damage, occurring for all plasma steps involved during interconnects processing. In the present paper, we focus on porous SiOCH low- damage mitigation using cryogenic temperature so as to enable micro-capillary condensation. The aim is to protect the porous low- from plasma-induced damage and keep the -value of the material unchanged, in order to limit the RC delay of interconnexion levels while shrinking the microchip dimension. The cryogenic temperature is used to condense a gas inside the porous low- material. Then, the etching process is performed at the temperature of condensation in order to keep the condensate trapped inside the material during the etching. In the first part of this work, the condensation properties of several gases are screened, leading to a down selection of five gases. Then, their stability into the porous structure is evaluated at different temperature. Four of them are used for plasma damage mitigation comparison. Damage mitigation is effective and shows negligible damage for one of the gases at –50°C.
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