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Frontiers of Chemical Science and Engineering >> 2016, Volume 10, Issue 4 doi: 10.1007/s11705-016-1598-7
Where physics meets chemistry: Thin film deposition from reactive plasmas
. School of Engineering, University of South Australia, Mawson Lakes, Australia, SA 5095. .. Future Industries Institute, University of South Australia, Mawson Lakes, Australia, SA 5095. .. Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3GJ, UK. .. Material Science Institute, Lancaster University, Lancaster, LA1 4YW, UK
Abstract
Keywords
thin films ; plasma physics ; plasma chemistry ; functionalization ; polymer
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