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Strategic Study of CAE >> 2009, Volume 11, Issue 11

Analytical models for the surface electrical field and temperature distributions of novel PB-PSOI devices

1. National ASIC System Engineering Research Center, Southeast University, Nanjing 210096, China;

2. School of Electronic Science and Technology, Anhui University, Hefei 230039, China

Funding project:江苏省自然基金资助项目(BK2008287);东南大学国家自然基金预言项目(XJ2008312) Received: 2008-04-11 Available online: 2009-11-12 13:08:03.000

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Abstract

In this paper, the 2-D analytical models for the surface electrical field and temperature distributions of PB-PSOI devices in terms of Poisson's solution and thermal diffusion solution have been suggested. The analytical results of the presented models show a good agreement with the numerical simulation results obtained by Medici. The dependences of the surface electrical field and temperature on the thickness and the length of the buried oxide have also been discussed in detail. Finally, the methods to optimize the thickness and the length of the buried oxide have been proposed to achieve the high performance of PB-PSOI devices.

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References

[ 1 ] Duan Baoxing, Zhang Bo, Li Zhaoji.New concept for improving characteristics of high -voltage power devices by buried layers modulation effect[ A] .ICSICT '06 [ C] ,2006 :239 -241

[ 2 ] Porter D, Stirling DsG.Integration Equations[ M] .Cambridge U- niversity Press,1990

[ 3 ] S.-Y.Han, H.-W.Kim, S.-K.Chung.Surface field distri- bution and breakdown voltage of RESURF LDMOSFETS [ J] .Mi- croelectronics Journal, 2000 , 31 ( 8 ) :685 -688 link1

[ 4 ] S.-K.Chung, S.-Y.Han.Analytical model for the surface field distribution of SOI RESURF Devices[ J] .IEEE Transactions on Electron Devices, 1988 ,45 ( 6 ) :1374 -1376 link1

[ 5 ] He Jin, Zhang Xing.Quasi -2 -D analytical model for surface field distribution and opitimization of RESURF LDMOS transistor [ J] .Microelectron Journal, 2001 ,32 ( 8 ) :655 -663

[ 6 ] Sun Weifeng, Shi Longxing.Analytical models for surface poten- tial and electrical field distribution of bulk -silicon RESURF de- vices[ J] .Solid -Sate Electronics, 2004 , 48 ( 5 ) :799 -805 link1

[ 7 ] Lim H T, Udrea F,Garner D M ,et al.Modelling of self -heating effect in thin SOI and Partial SOI LDMOS power devices[ J] .Solid -State Electronics, 1999 , 43 ( 7 ) :1267 -1280 link1

[ 8 ] Zhu Ming,Chen Peng,Fu R K.-Y,et al.Numerical study of self -heating effects of MOSFETs fabricated on SOAN substrate [ J] . IEEE Transactions on Electron Devices, 2004 , 51 ( 6 ) :901 -906 link1

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