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Zilian QU,Yonggang MENG,Qian ZHAO
Frontiers of Mechanical Engineering 2015, Volume 10, Issue 1, Pages 1-6 doi: 10.1007/s11465-015-0325-2
Keywords: CMP eddy current multilayer wafer Cu interconnects equivalent unit
Qing-hua He,De-lei Yang,Yong-kui Li,Lan Luo
Frontiers of Engineering Management 2015, Volume 2, Issue 2, Pages 148-153 doi: 10.15302/J-FEM-2015024
Keywords: construction megaproject (CMP) organizational citizenship behavior connotation grounded theory
Title Author Date Type Operation
Eddy current measurement of the thickness of top Cu film of the multilayer interconnects in the integrated circuit (IC) manufacturing process
Zilian QU,Yonggang MENG,Qian ZHAO
Journal Article