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MEMS-based thermoelectric infrared sensors: A review

Dehui XU, Yuelin WANG, Bin XIONG, Tie LI

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 557-566 doi: 10.1007/s11465-017-0441-2

Abstract: thermoelectric infrared (IR) sensors have received considerable attention because of the advances in micromachining

Keywords： thermoelectric infrared sensor     CMOS-MEMS     thermopile     micromachining     wafer-level package    

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MEMS-based thermoelectric infrared sensors: A review

Dehui XU, Yuelin WANG, Bin XIONG, Tie LI

Journal Article