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Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning
Ruizhou WANG, Xianmin ZHANG
Frontiers of Mechanical Engineering 2015, Volume 10, Issue 1, Pages 20-36 doi: 10.1007/s11465-015-0328-z
Packaged piezoelectric ceramic actuators (PPCAs) and compliant mechanisms are attractive for nanopositioningposition of the terminal moving plate, the positioning accuracy and the dynamic performance of the nanopositioningpresents a novel external preload mechanism and tests it in a 1-degree of freedom (1-DOF) compliant nanopositioning
Keywords: nanopositioning preload characteristic packaged piezoelectric ceramic actuator compliant mechanism
High-bandwidth nanopositioning via active control of system resonance
Linlin LI, Sumeet S. APHALE, Limin ZHU
Frontiers of Mechanical Engineering 2021, Volume 16, Issue 2, Pages 331-339 doi: 10.1007/s11465-020-0619-x
Keywords: nanopositioning stage high-bandwidth resonant mode control tracking control integral resonant control
Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator Research Article
Bimal Jeet GOTEEA, Qianjun ZHANG, Wei DONG,bj.goteea@gmail.com,zhang_qj@stu.hit.edu.cn,dongwei@hit.edu.cn
Frontiers of Information Technology & Electronic Engineering 2023, Volume 24, Issue 7, Pages 1080-1092 doi: 10.1631/FITEE.2200255
Keywords: Nanopositioning Flexure guides Long range Voice coil motor Lorentz force actuator
Nanopositioning and Nonlinearity Compensation for Step Imprint Lithography Tool
LU Bing-heng, LIU Hong-zhong, DING Yu-cheng, WANG Li, QIU Zhi-hui
Frontiers of Mechanical Engineering 2006, Volume 1, Issue 1, Pages 6-13 doi: 10.1007/s11465-005-0003-x
In this paper, the motion mode and nanopositioning accuracy in the step imprinting lithography process
Keywords: different nonoscillatory nonlinearity integral derivative positioning
A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing
Zhen Zhang, Peng Yan, Guangbo Hao
Engineering 2017, Volume 3, Issue 5, Pages 708-715 doi: 10.1016/J.ENG.2017.05.020
This paper presents the design, development, and control of a large range beam flexure-based nano servo system for the micro-stereolithography (MSL) process. As a key enabler of high accuracy in this process, a compact desktop-size beam flexure-based nanopositioner was designed with millimeter range and nanometric motion quality. This beam flexure-based motion system is highly suitable for harsh operation conditions, as no assembly or maintenance is required during the operation. From a mechanism design viewpoint, a mirror-symmetric arrangement and appropriate redundant constraints are crucial to reduce undesired parasitic motion. Detailed finite element analysis (FEA) was conducted and showed satisfactory mechanical features. With the identified dynamic models of the nanopositioner, real-time control strategies were designed and implemented into the monolithically fabricated prototype system, demonstrating the enhanced tracking capability of the MSL process. The servo system has both a millimeter operating range and a root mean square (RMS) tracking error of about 80 nm for a circular trajectory.
Keywords: Precision additive manufacturing.Micro-stereolithography.Nanopositioning.Beam flexure
Title Author Date Type Operation
Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning
Ruizhou WANG, Xianmin ZHANG
Journal Article
High-bandwidth nanopositioning via active control of system resonance
Linlin LI, Sumeet S. APHALE, Limin ZHU
Journal Article
Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator
Bimal Jeet GOTEEA, Qianjun ZHANG, Wei DONG,bj.goteea@gmail.com,zhang_qj@stu.hit.edu.cn,dongwei@hit.edu.cn
Journal Article
Nanopositioning and Nonlinearity Compensation for Step Imprint Lithography Tool
LU Bing-heng, LIU Hong-zhong, DING Yu-cheng, WANG Li, QIU Zhi-hui
Journal Article