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Journal Article 5

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Flexure guides 1

Long range 1

Lorentz force actuator 1

Nanopositioning 1

Precision additive manufacturing.Micro-stereolithography.Nanopositioning.Beam flexure 1

Voice coil motor 1

compliant mechanism 1

different 1

high-bandwidth 1

integral derivative 1

integral resonant control 1

nanopositioning 1

nanopositioning stage 1

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packaged piezoelectric ceramic actuator 1

positioning 1

preload characteristic 1

resonant mode control 1

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Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning

Ruizhou WANG, Xianmin ZHANG

Frontiers of Mechanical Engineering 2015, Volume 10, Issue 1,   Pages 20-36 doi: 10.1007/s11465-015-0328-z

Abstract:

Packaged piezoelectric ceramic actuators (PPCAs) and compliant mechanisms are attractive for nanopositioningposition of the terminal moving plate, the positioning accuracy and the dynamic performance of the nanopositioningpresents a novel external preload mechanism and tests it in a 1-degree of freedom (1-DOF) compliant nanopositioning

Keywords: nanopositioning     preload characteristic     packaged piezoelectric ceramic actuator     compliant mechanism    

High-bandwidth nanopositioning via active control of system resonance

Linlin LI, Sumeet S. APHALE, Limin ZHU

Frontiers of Mechanical Engineering 2021, Volume 16, Issue 2,   Pages 331-339 doi: 10.1007/s11465-020-0619-x

Abstract: Typically, the achievable positioning bandwidth for piezo-actuated nanopositioners is severely limited by the first, lightly-damped resonance. To overcome this issue, a variety of open- and closed-loop control techniques that commonly combine damping and tracking actions, have been reported in literature. However, in almost all these cases, the achievable closed-loop bandwidth is still limited by the original open-loop resonant frequency of the respective positioning axis. Shifting this resonance to a higher frequency would undoubtedly result in a wider bandwidth. However, such a shift typically entails a major mechanical redesign of the nanopositioner. The integral resonant control (IRC) has been reported earlier to demonstrate the significant performance enhancement, robustness to parameter uncertainty, gua-ranteed stability and design flexibility it affords. To further exploit the IRC scheme’s capabilities, this paper presents a method of actively shifting the resonant frequency of a nanopositioner’s axis, thereby delivering a wider closed-loop positioning bandwidth when controlled with the IRC scheme. The IRC damping control is augmented with a standard integral tracking controller to improve positioning accuracy. And both damping and tracking control parameters are analytically optimized to result in a Butterworth Filter mimicking pole-placement—maximally flat passband response. Experiments are conducted on a nanopositioner’s axis with an open-loop resonance at 508 Hz. It is shown that by employing the active resonance shifting, the closed-loop positioning bandwidth is increased from 73 to 576 Hz. Consequently, the root-mean-square tracking errors for a 100 Hz triangular trajectory are reduced by 93%.

Keywords: nanopositioning stage     high-bandwidth     resonant mode control     tracking control     integral resonant control    

Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator Research Article

Bimal Jeet GOTEEA, Qianjun ZHANG, Wei DONG,bj.goteea@gmail.com,zhang_qj@stu.hit.edu.cn,dongwei@hit.edu.cn

Frontiers of Information Technology & Electronic Engineering 2023, Volume 24, Issue 7,   Pages 1080-1092 doi: 10.1631/FITEE.2200255

Abstract: This paper presents a precision centimeter-range positioner based on a using . An additional digital-to-analog converter and an operational amplifier (op amp) circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level. First, a suitable coil is designed for the actuator based on the stiffness of the flexure guide model. The flexure mechanism and actuator performance are then verified with finite element analysis. Based on these, a means to enhance the positioning performance electronically is presented together with the control scheme. Finally, a prototype is fabricated, and the performance is evaluated. This positioner features a range of 10 mm with a resolution of 10 nm. The proposed scheme can be extended to other systems.

Keywords: Nanopositioning     Flexure guides     Long range     Voice coil motor     Lorentz force actuator    

Nanopositioning and Nonlinearity Compensation for Step Imprint Lithography Tool

LU Bing-heng, LIU Hong-zhong, DING Yu-cheng, WANG Li, QIU Zhi-hui

Frontiers of Mechanical Engineering 2006, Volume 1, Issue 1,   Pages 6-13 doi: 10.1007/s11465-005-0003-x

Abstract:

In this paper, the motion mode and nanopositioning accuracy in the step imprinting lithography process

Keywords: different     nonoscillatory     nonlinearity     integral derivative     positioning    

A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing

Zhen Zhang, Peng Yan, Guangbo Hao

Engineering 2017, Volume 3, Issue 5,   Pages 708-715 doi: 10.1016/J.ENG.2017.05.020

Abstract:

This paper presents the design, development, and control of a large range beam flexure-based nano servo system for the micro-stereolithography (MSL) process. As a key enabler of high accuracy in this process, a compact desktop-size beam flexure-based nanopositioner was designed with millimeter range and nanometric motion quality. This beam flexure-based motion system is highly suitable for harsh operation conditions, as no assembly or maintenance is required during the operation. From a mechanism design viewpoint, a mirror-symmetric arrangement and appropriate redundant constraints are crucial to reduce undesired parasitic motion. Detailed finite element analysis (FEA) was conducted and showed satisfactory mechanical features. With the identified dynamic models of the nanopositioner, real-time control strategies were designed and implemented into the monolithically fabricated prototype system, demonstrating the enhanced tracking capability of the MSL process. The servo system has both a millimeter operating range and a root mean square (RMS) tracking error of about 80 nm for a circular trajectory.

Keywords: Precision additive manufacturing.Micro-stereolithography.Nanopositioning.Beam flexure    

Title Author Date Type Operation

Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning

Ruizhou WANG, Xianmin ZHANG

Journal Article

High-bandwidth nanopositioning via active control of system resonance

Linlin LI, Sumeet S. APHALE, Limin ZHU

Journal Article

Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator

Bimal Jeet GOTEEA, Qianjun ZHANG, Wei DONG,bj.goteea@gmail.com,zhang_qj@stu.hit.edu.cn,dongwei@hit.edu.cn

Journal Article

Nanopositioning and Nonlinearity Compensation for Step Imprint Lithography Tool

LU Bing-heng, LIU Hong-zhong, DING Yu-cheng, WANG Li, QIU Zhi-hui

Journal Article

A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing

Zhen Zhang, Peng Yan, Guangbo Hao

Journal Article