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Nanopositioning and Nonlinearity Compensation for Step Imprint Lithography Tool
LU Bing-heng, LIU Hong-zhong, DING Yu-cheng, WANG Li, QIU Zhi-hui
Frontiers of Mechanical Engineering 2006, Volume 1, Issue 1, Pages 6-13 doi: 10.1007/s11465-005-0003-x
Keywords: different nonoscillatory nonlinearity integral derivative positioning
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