Error analysis of the parameters for non-coaxial grazing X-ray microscope

2007年第2卷第3期

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《机械工程前沿（英文）》 >> 2007年第2卷第3期 doi: 10.1007/s11465-007-0057-z

Error analysis of the parameters for non-coaxial grazing X-ray microscope

1.School of Electronic and Information Engineering, Dalian University of Technology, Dalian 116024, China; School of Physics and Electronic Engineering, Ludong University, Yantai 264025, China; 2.School of Electronic and Information Engineering, Dalian University of Technology, Dalian 116024, China

发布日期： 2007-09-05

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摘要

A non-coaxial grazing X-ray microscope, consisting of four spherical mirrors, is designed for diagnosis of inertial confinement fusion (ICF). The aberrations and imaging quality of the microscope are analyzed. To acquire excellent imaging quality, suitable tolerances for manufacturing and assembling the microscope are necessary. This paper researches the changes of Gauss parameters and aberrations due to component and subsystem parameters (such as the radius of the mirror, angle between mirrors, grazing angle, object distance, etc.). Here, spot diagrams and modulation transfer function (MTF) are first adopted to quantitatively evaluate the imaging quality of the microscope. Suitable manufacturing tolerances of components and assembly tolerances of the system are established on the basis of the discussion and analysis. A set of non-coaxial grazing X-ray microscopes is manufactured based on the tolerances. In site tests of ICF, the images with high resolution are obtained by the microscope.

关键词

non-coaxial ; spherical ; manufacturing ; necessary ; diagnosis