Model reduction techniques for dynamics analysis of ultra-precision linear stage

2009年第4卷第1期

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《机械工程前沿（英文）》 >> 2009年第4卷第1期 doi: 10.1007/s11465-009-0009-x

Model reduction techniques for dynamics analysis of ultra-precision linear stage

State Key Laboratory of Numerical Manufacture & Equipment, Huazhong University of Science & Technology, Wuhan 430074, China

发布日期： 2009-03-05

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摘要

Spring-damping elements are used to simplify the internal interaction in the proposed finite element (FE) model of an ultra-precision linear stage. The dynamics behavior is studied. The comparison between mode shapes from the eigenvalue analysis shows that the components, except the translator, can represent system dynamics characteristics. A reduction approach is used to simplify the system in a dynamic studied. There is little difference between the vibration mode and the response analysis. The experimental modal analysis proves the validity of the reduction approach, which can be generalized to the development and dynamics characteristic study of a complex system model to obviously save computational resource.

关键词

dynamics analysis ; air-bearing ; linear stage ; reduction