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《工程(英文)》 >> 2018年 第4卷 第6期 doi: 10.1016/j.eng.2018.09.010

基于AFM探针的纳米加工技术制备周期性纳米结构——沟槽和材料堆积形貌相结合

a Key Laboratory of Micro-systems and Micro-structures Manufacturing of the Ministry of Education, Harbin Institute of Technology, Harbin 150001, China

b Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China

c Cardiff School of Engineering, Cardiff University, Cardiff CF24 3AA, UK

收稿日期: 2018-04-28 修回日期: 2018-06-15 录用日期: 2018-09-18 发布日期: 2018-09-26

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摘要

本文提出了一种基于原子力显微镜(AFM)探针的加工技术制备周期性纳米结构的方法,该方法通过将加工得到的沟槽形貌和沟槽边缘的材料堆积形貌相结合得到周期性纳米结构。研究发现控制相邻沟槽的间距是保证周期性纳米结构质量的重要因素。实验结果表明,当相邻刻划轨迹间的进给量值等于单个沟槽两侧材料堆积峰值间的宽度时,可以通过本方法加工得到较高质量的周期性结构。加工得到的纳米结构周期性可以通过一维和二维快速傅里叶变换(FFT)算法进行评价。在检测得到周期结构的AFM 图像中,取其截面进行FFT并将幅频特性曲线归一化,在幅频特性曲线中用峰值部分面积与总体面积的比值来定量分析纳米结构的周期性。最后,对加工得到的周期性纳米结构产生的颜色化效应进行了研究,证明了其在防伪以及金属传感等领域有潜在的应用价值。

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