[ 1 ] 楼祺洪, 徐捷, 傅淑芬, 等. 脉冲放电气体激光器 [M]. 北京: 科 学出版社, 1993. Lou Q H, Xu J, Fu S F, et al. Gas laser with pulsed discharge [M]. Beijing: China Science Publishing & Media Ltd., 1993.
Lou Q H, Xu J, Fu S F, et al. Gas laser with pulsed discharge [M]. Beijing: China Science Publishing & Media Ltd., 1993. Chinese.

[ 2 ] Colin W. History of gas lasers, Part 2: Pulsed gas lasers [J]. Optics & Photonics, 2010, 21(2): 20–27. 链接1

[ 3 ] Basov N G, Danilychev V A, Popov Y M, et al. Laser operating in the vacuum region of the spectrum by excitation of liquid xenon with an electron beam [J]. JETP Letters, 1970, 12(10): 329. 链接1

[ 4 ] Rokitski R, Ishihara T, Rao R, et al. High reliability ArF light source for double patterning immersion lithography [J]. Optical Microlithography XXIII, 2010, 7640: 1–7. 链接1

[ 5 ] 余吟山, 游利兵, 梁勖, 等. 准分子激光技术发展 [J]. 中国激光, 2010, 37(9): 2253–2270. Yu Y S, You L B, Liang X, et al. Progress of excimer lasers technology [J]. Chinese Journal of Laser, 2010, 37(9): 2253–2270.
Yu Y S, You L B, Liang X, et al. Progress of excimer lasers technology [J]. Chinese Journal of Laser, 2010, 37(9): 2253– 2270. Chinese. 链接1

[ 6 ] 楼祺洪, 袁志军, 张海波. 光刻技术的历史与现状 [J]. 科学, 2017, 69(3): 32–36. Lou Q H, Yuan Z J, Zhang H B. History and status of lithography [J]. Science, 2017, 69(3): 32–36.
Lou Q H, Yuan Z J, Zhang H B. History and status of lithography [J]. Science, 2017, 69(3): 32–36. Chinese. 链接1

[ 7 ] 何立文, 方晓东. 准分子激光微加工应用研究进展 [J]. 量子电 子学报, 2018, 35(6): 641–648. He L W, Fang X D. Progress of application of excimer laser micromachining [J]. Chinese Journal of Quantum Electronics. 2018, 35(6): 641–648.
He L W, Fang X D. Progress of application of excimer laser micromachining [J]. Chinese Journal of Quantum Electronics. 2018, 35(6): 641–648. Chinese. 链接1

[ 8 ] Wang H, Lin H, Wang C, et al. Laser drilling of structural ceramics— A review [J]. Journal of the European Ceramic Society, 2017, 37(4): 1157–1173. 链接1

[ 9 ] 赵读亮. 工业及医用准分子激光系统关键技术研究 [D]. 合肥: 中国科学技术大学(博士学位论文), 2017. Zhao D L. Study on key techniques of medical and industrial excimer laser system [D]. Hefei: University of Science and Technology of China (Doctoral dissertation), 2017.
Zhao D L. Study on key techniques of medical and industrial excimer laser system [D]. Hefei: University of Science and Technology of China (Doctoral dissertation), 2017. Chinese. 链接1

[10] Insung C, Hu Y J, Hyeyoung S, et al. Laser-induced phase separation of silicon carbide [J]. Nature Communications, 2016, 7: 1–14.

[11] Mitwally M E, Tsuchiya T, Tabata O, et al. Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment [J]. Japanese Journal of Applied Physics, 2014, 53(6S): 1–6. 链接1

[12] Kobayashi M, Kakizaki K, Oizumi H, et al. DUV high power lasers processing for glass and CFRP [C]. Prague: SPIE Optics + Optoelectronics, 2017. 链接1

[13] Yuji S, Masahiro T, Tatsuya N, et al. Experimental study of CFRP cutting with nanosecond lasers [J]. Transactions of JWRI, 2013, 42(1): 23–26.

[14] Delmdahl R, Gabler F. Excimer lasers clean CFRPs for optimized adhesive bonding [J]. The Laser User, 2013 (72): 10.

[15] 楼祺洪. 准分子激光器的发展和应用[J]. 中国激光, 1994, A21(5): 361–364. Lou Q H. Progress of excimer lasers and its applications [J]. Chinese Journal of Lasers, 1994, A21(5): 361–364.
Lou Q H. Progress of excimer lasers and its applications [J]. Chinese Journal of Lasers, 1994, A21(5): 361–364. Chinese. 链接1

[16] 邱佩华. 准分子激光器的技术应用走向商品化 [J]. 激光与光电 子学进展, 1987 (5): 25–27. Qiu P H. Commercialization of excimer laser technology application [J]. Laser & Optoelectronics Progress, 1987 (5): 25– 27.
Qiu P H. Commercialization of excimer laser technology application [J]. Laser & Optoelectronics Progress, 1987 (5): 25– 27. Chinese. 链接1

[17] 袁才来, 上官诚, 叶超, 等. 用193毫微米ArF准分子激光对 HgBr_2进行单光子和双光子解离的研究 [J]. 激光, 1981 (4): 62–63. Yuan C L, Shangguan C, Ye C, et al. Study on single-photon and two-photon dissociation of HgBr_2 by 193 nm ArF excimer laser [J]. Laser, 1981 (4): 62–63.
Yuan C L, Shangguan C, Ye C, et al. Study on single-photon and two-photon dissociation of HgBr_2 by 193 nm ArF excimer laser [J]. Laser, 1981 (4): 62–63. Chinese. 链接1

[18] 李政达. 6H-SiC单晶与YBCO超导薄膜激光抛光机理与工艺研 究 [D]. 北京: 北京工业大学(博士学位论文), 2017. Li Z D. Study on laser polishing mechanism and technology of 6H silicon carbide monocrystal and YBCO superconducting film [D]. Beijing: Beijing University of Technology (Doctoral dissertation), 2017.
Li Z D. Study on laser polishing mechanism and technology of 6H silicon carbide monocrystal and YBCO superconducting film [D]. Beijing: Beijing University of Technology (Doctoral dissertation), 2017. Chinese. 链接1

[19] 邓黎杰. 氢化纳米硅薄膜准分子激光诱导晶化的研究 [D]. 上 海: 上海交通大学(博士学位论文), 2015. Deng L J. The study on excimer laser crystallization of nanocrystalline silicon thin films [D]. Shanghai: Shanghai Jiao Tong University (Doctoral dissertation), 2015.
Deng L J. The study on excimer laser crystallization of nanocrystalline silicon thin films [D]. Shanghai: Shanghai Jiao Tong University (Doctoral dissertation), 2015. Chinese. 链接1

[20] Guo X, Ding J B, Zhou Y, et al. Ablation effects and mechanism of sintered silicon carbide ceramics by ArF excimer laser [J]. Chinese Optics Letters, 2018, 16(9): 59–63. 链接1