正文
《能源前沿(英文)》 >> 2018年 第12卷 第2期 doi: 10.1007/s11708-018-0556-0
Electrochemical performance of thermally-grown SiO
. Key Laboratory of MEMS of the Ministry of Education, School of Electronic Science and Engineering, Southeast University, Nanjing 210096, China.. School of Chemistry and Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
摘要
关键词
autonomous micro system ; direct integration ; barrier layer ; thermal SiO2 film ; X-ray photoelectron spectroscopy (XPS)
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