正文
《机械工程前沿(英文)》 >> 2010年 第5卷 第3期 doi: 10.1007/s11465-010-0100-3
Application and evaluation of optical distance measurements in geometrical quality testing of microgears
IPE–Institute of Product Engineering, KIT, D-76131, Karlsruhe, Germany;
摘要
关键词
microgear ; optical distance measurement ; profile deviation ; CWL sensor ; micromechanical technology (MMT)
正文