正文
《信息与电子工程前沿(英文)》 >> 2015年 第16卷 第6期 doi: 10.1631/FITEE.1400349
A combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer
Micro-Satellite Research Center, Zhejiang University, Hangzhou 310027, China
摘要
关键词
Bias drift ; Closed-loop MEMS accelerometer ; Modulated feedback approach ; Temperature compensation
正文