正文
《机械工程前沿(英文)》 >> 2006年 第1卷 第4期 doi: 10.1007/s11465-006-0050-y
Porosity model for flows in CMP
1.School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, Beijing 100044, China; 2.State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China;
摘要
关键词
multilevel technique ; three-dimensional ; proportional ; research ; thicker
正文