正文
《机械工程前沿(英文)》 >> 2008年 第3卷 第4期 doi: 10.1007/s11465-008-0063-9
Precision control system of two-DOF stage with linear ultrasonic motor
Precision Driving Laboratory, Nanjing University of Aeronautics and Astronautics
摘要
关键词
settling ; position accuracy ; PI control ; control algorithm ; orthogonal
正文