分析芯片微通道制作技术进展
1.山东大学控制科学与工程学院,济南 250061
2.中国科学院电子学研究所传感技术国家重点实验室,北京 100080
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摘要
微通道制作是微分析芯片制作中的关键技术之一。就选取材料的原则,模板复制中的模具制造技术及微通道直接加工方法做了比较,提出了微流体芯片产业化的可行性方案。
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