正文
《机械工程前沿(英文)》 >> 2019年 第14卷 第3期 doi: 10.1007/s11465-019-0538-x
Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages
State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China
摘要
关键词
nano-precision positioning stage ; analysis and design ; structural and dynamic parameters ; dynamic accuracy ; systematic modeling
正文