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2008 1

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Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

《机械工程前沿（英文）》 2008年 第3卷 第2期   页码 119-132 doi: 10.1007/s11465-008-0034-1

摘要： With the rapid development of science and technology, microelectronics manufacturing, photonics technology, space technology, ultra-precision machining, micro-robotics, biomedical engineering and other fields urgently need the support of modern precision driving theory and technology. Modern precision driving technology can be generally divided into two parts: electromagnetic and non-electromagnetic driving technology. Electromagnetic driving technology is based on traditional technology, has a low thrust-weight ratio, and needs deceleration devices with a cumbrous system or a complex structure. Moreover, it is difficult to improve positioning accuracy with this technology type. Thus, electromagnetic driving technology is still unable to meet the requirements for the above applications. Non-electromagnetic driving technology is a new choice. As a category of non-electromagnetic driving technology, piezoelectric driving technology becomes an important branch of modern precision driving technology. High holding torque and acute response make it suitable as an accurate positioning actuator. This paper presents the development of piezoelectric precision driving technology at home and abroad and gives an in-depth analysis. Future perspectives on the technology’s applications in the following fields are described: 1) integrated circuit manufacturing technology; 2) fiber optic component manufacturing technology; 3) micro parts manipulation and assembly technology; 4) biomedical engineering; 5) aerospace technology; and 6) ultra-precision processing technology.

关键词： Electromagnetic     ultra-precision processing     technology     piezoelectric     cumbrous    

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Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

期刊论文