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静电自组装制备复合磨粒及其对铜的抛光特性研究

黄亦申,许雪峰,姚春燕,胡建德,彭伟

《中国工程科学》 2012年第14卷第10期页码 82-89

摘要：

研究苯代三聚氰胺甲醛（BGF）微球与阳离子型聚电解质聚二烯丙基二甲基氯化铵（PDADMAC）、阴离子型聚电解质聚4－苯乙烯璜酸钠（PSS）之间的吸附特性，利用静电自组装技术改变和控制BGF微球的荷电特性，制备出不同形式的PEi BGF/SiO2复合磨粒，以Zeta电位、透射电子显微镜（TEM）和热重分析（TG）等手段对复合磨粒进行了表征，并利用这些复合磨粒制备了铜片抛光用的复合磨粒抛光液。抛光试验表明，吸附在聚合物微球表面和游离于抛光液中的SiO2磨粒在抛光中均起到材料去除作用。传统单一SiO2磨粒抛光液的铜材料去除率为264 nm/min，PE0 BGF/SiO2混合磨粒抛光液的铜材料去除率为348 nm/min，PE3 BGF/SiO2复合磨粒抛光液的铜材料去除率为476 nm/min。经上述3种抛光液抛光后的铜表面，在5 μm×5 μm范围内，表面粗糙度Ra从0.166 μm分别降至3.7 nm、2.6 nm和1.5 nm，峰谷值Rpv分别小于20 nm、14 nm和10 nm，复合磨粒抛光液对铜片有良好的抛光性能。

关键词：化学机械抛光抛光液复合磨粒聚电解质铜片

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Review on mechanism and process of surface polishing using lasers

Arun KRISHNAN, Fengzhou FANG

《机械工程前沿（英文）》 2019年第14卷第3期页码 299-319 doi: 10.1007/s11465-019-0535-0

摘要： Laser polishing is a technology of smoothening the surface of various materials with highly intense laser beams. When these beams impact on the material surface to be polished, the surface starts to be melted due to the high temperature. The melted material is then relocated from the ‘peaks to valleys’ under the multidirectional action of surface tension. By varying the process parameters such as beam intensity, energy density, spot diameter, and feed rate, different rates of surface roughness can be achieved. High precision polishing of surfaces can be done using laser process. Currently, laser polishing has extended its applications from photonics to molds as well as bio-medical sectors. Conventional polishing techniques have many drawbacks such as less capability of polishing freeform surfaces, environmental pollution, long processing time, and health hazards for the operators. Laser polishing on the other hand eliminates all the mentioned drawbacks and comes as a promising technology that can be relied for smoothening of initial topography of the surfaces irrespective of the complexity of the surface. Majority of the researchers performed laser polishing on materials such as steel, titanium, and its alloys because of its low cost and reliability. This article gives a detailed overview of the laser polishing mechanism by explaining various process parameters briefly to get a better understanding about the entire polishing process. The advantages and applications are also explained clearly to have a good knowledge about the importance of laser polishing in the future.

关键词： laser polishing surface roughness process parameters mechanism

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Numerical analysis of hydrodynamic process of circular-translational-moving polishing (CTMP)

ZHAI Wenjie, LIU Changxiong, LIANG Yingchun

《机械工程前沿（英文）》 2008年第3卷第4期页码 441-448 doi: 10.1007/s11465-008-0074-6

摘要： By keeping a pad moving relative to a wafer along a circular path without rotation, we developed a polishing technique called circular-translational-moving polishing (CTMP), which permits multidirectional polishing of the work piece and thus bears the advantage of isotropic polishing and a potential increase of material removal rate (MRR) on the wafer. To illuminate the mechanisms of CTMP and determine the optimum process variables in a CTMP process, a three-dimensional hydrodynamic lubrication model for CTMP with a smooth and rigid pad under a quasi-stable state is established in a polar coordinate system. The model equations are further calculated numerically by the finite difference method. The instantaneous distribution of fluid pressure is obtained, which shows that a negative pressure exists. The reason for negative pressure in CTMP and its effect on polishing is discussed. Moreover, the nominal clearance of the fluid film, roll, and pitch angles under different working conditions are obtained in terms of the applied load, moments, and polishing velocity. The obtained numerical analysis can be used as guidance for choosing operation parameters in a practical CTMP application.

关键词： numerical analysis practical CTMP circular-translational-moving polishing CTMP different

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Advances in polishing of internal structures on parts made by laser-based powder bed fusion

《机械工程前沿（英文）》 2023年第18卷第1期 doi: 10.1007/s11465-022-0724-0

摘要： The internal structures of metallic products are important in realizing functional applications. Considering the manufacturing of inner structures, laser-based powder bed fusion (L-PBF) is an attractive approach because its layering principle enables the fabrication of parts with customized interior structures. However, the inferior surface quality of L-PBF components hinders its productization progress seriously. In this article, process, basic forms, and applications relevant to L-PBF internal structures are reviewed comprehensively. The causes of poor surface quality and differences in the microstructure and property of the surface features of L-PBF inner structures are presented to provide a perspective of their surface characteristics. Various polishing technologies for L-PBF components with inner structures are presented, whereas their strengths and weaknesses are summarized along with a discussion on the challenges and prospects for improving the interior surface quality of L-PBF parts.

关键词： laser-based powder bed fusion polishing internal structures surface quality surface features post process additive manufacturing

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Experimental study on high-efficiency polishing for potassium dihydrogen phosphate (KDP) crystal by using

Ziyuan LIU, Hang GAO, Dongming GUO

《机械工程前沿（英文）》 2020年第15卷第2期页码 294-302 doi: 10.1007/s11465-019-0576-4

摘要： A high-efficiency polishing approach using two-phase air–water fluid (TAWF) is proposed to avoid surface contamination and solve the inefficiency of previous water-dissolution polishing techniques for potassium dihydrogen phosphate (KDP) crystal. In the proposed method, controllable deliquescence is implemented without any chemical impurity. The product of deliquescence is then removed by a polishing pad to achieve surface planarization. The mechanism underlying TAWF polishing is analyzed, a special device is built to polish the KDP crystal, and the effect of relative humidity (RH) on polishing performance is studied. The relationship between key parameters of polishing and surface planarization is also investigated. Results show that the polishing performance is improved with increasing RH. However, precisely controlling the RH is extremely difficult during TAWF polishing. Controllable deliquescence can easily be disrupted once the RH fluctuates, which therefore needs to be restricted to a low level to avoid its influence on deliquescence rate. The material removal of TAWF polishing is mainly attributed to the synergistic effect of deliquescence and the polishing pad. Excessive polishing pressure and revolution rate remarkably reduce the life of the polishing pad and the surface quality of the KDP crystal. TAWF polishing using IC-1000 and TEC-168S increase the machining efficiency by 150%, and a smooth surface with a root mean square surface roughness of 5.5 nm is obtained.

关键词： potassium dihydrogen phosphate (KDP) crystal controllable deliquescence two-phase air–water fluid high-efficiency polishing material removal

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Study on micro-texture and skid resistance of aggregate during polishing

Zhenyu QIAN, Lingjian MENG

《结构与土木工程前沿（英文）》 2017年第11卷第3期页码 346-352 doi: 10.1007/s11709-017-0409-7

摘要： The skid resistance performance of pavement is closely related to the micro-texture of pavement aggregate, while there is very few research on the relationship between micro-texture and the skid resistance. In this paper, the optical microscope is used to acquire the surface morphology of three types of aggregates including basalt, limestone and red sandstone respectively, where a total of 12 indicators are developed based on the surface texture information. The polishing effect on aggregate is simulated by Wehner/Schulze (W/S) device, during the polishing procedure, the skid resistance are measured by British Pendulum Tester (BPT). Based on the results of independent T-test and the polishing resistance analysis, it shows that the surface texture of basalt is significantly different between limestone and red sandstone. Three indicators including the average roughness ( ), the kurtosis of the surface ( ) and the mean summit curvature ( ) are selected to describe the characteristics of aggregate micro-texture based on the correlation analysis. The contribution of micro-texture to the skid resistance can be described with the secondary polynomial regression model by these indicators.

关键词： skid resistance of pavement micro-texture aggregates polishing test

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面向大幅面金属增材抛光的激光扫描振镜与伺服台协同控制系统 Article

崔梦嘉, 卢立斌, 张震, 管迎春

《工程（英文）》 2021年第7卷第12期页码 1732-1740 doi: 10.1016/j.eng.2020.06.028

摘要：

为了满足高品质金属增材制造的迫切需求，本文创新地提出了一种以激光扫描振镜与精密伺服台协同控制为核心的大幅面激光精密抛光方法，以实现大幅面选区激光熔化（SLM）成形镍合金精密抛光。我们提出的协同控制系统主要包括主从式新型协同控制架构、运动矢量分解和误差合成等核心模块。研究实验结果表明，与传统步进-扫描方法相比，该协同控制系统实现了激光光斑连续运动，避免了拼接误差，加工效率提升了38.24%。由于激光扫描路径更流畅，相应能量分布更均匀，因此，大幅面抛光质量得到显著改善。本协同系统为大幅面、高精度、高效率的激光精密加工提供了重要途径，在航空航天、新能源、高端模具、医疗器械等精密制造领域具有广阔的应用前景。

关键词：协同控制激光制造拼接误差激光抛光大幅面

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Laboratory and field evaluation of asphalt pavement surface friction resistance

Zhong WU, Chris ABADIE

《结构与土木工程前沿（英文）》 2018年第12卷第3期页码 372-381 doi: 10.1007/s11709-017-0463-1

摘要：

Pavement surface friction is a significant factor for driving safety and plays a critical role in reducing wet-pavement crashes. However, the current asphalt mixture design procedure does not directly consider friction as a requirement. The objective of this study was to develop a surface friction prediction model that can be used during a wearing course mixture design. To achieve the objective, an experimental study was conducted on the frictional characteristics of typical wearing course mixtures in Louisiana. Twelve wearing course mixtures including dense-graded and open-graded mixes with different combinations of aggregate sources were evaluated in laboratory using an accelerated polishing and testing procedure considering both micro- and macro texture properties. In addition, the surface frictional properties of asphalt mixtures were measured on twenty-two selected asphalt pavement sections using different in situ devices including Dynamic Friction Tester (DFT), Circular Texture Meter (CTM), and Lock-Wheel Skid Trailer (LWST). The results have led to develop a procedure for predicting pavement end-of-life skid resistance based on the aggregate blend polish stone value, gradation parameters, and traffic, which is suited in checking whether the selected aggregates in a wearing course mix design would meet field friction requirements under a certain design traffic polishing.

关键词： friction skid resistance polishing PSV LWST micro-texture macro-texture

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Review on the progress of ultra-precision machining technologies

Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG

《机械工程前沿（英文）》 2017年第12卷第2期页码 158-180 doi: 10.1007/s11465-017-0455-9

摘要：

Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracy and surface quality. As more research findings are published, such technologies now involve complicated systems engineering and been widely used in the production of components in various aerospace, national defense, optics, mechanics, electronics, and other high-tech applications. The conception, applications and history of ultra-precision machining are introduced in this article, and the developments of ultra-precision machining technologies, especially ultra-precision grinding, ultra-precision cutting and polishing are also reviewed. The current state and problems of this field in China are analyzed. Finally, the development trends of this field and the coping strategies employed in China to keep up with the trends are discussed.

关键词： ultra-precision grinding ultra-precision cutting ultra-precision polishing research status in China development tendency