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Fabrication of Si-based three-dimensional microbatteries: A review

Chuang YUE, Jing LI, Liwei LIN

《机械工程前沿（英文）》 2017年第12卷第4期页码 459-476 doi: 10.1007/s11465-017-0462-x

摘要：

High-performance, Si-based three-dimensional (3D) microbattery systems for powering micro/nano-electromechanical systems and lab-on-chip smart electronic devices have attracted increasing research attention. These systems are characterized by compatible fabrication and integratibility resulting from the silicon-based technologies used in their production. The use of support substrates, electrodes or current collectors, electrolytes, and even batteries used in 3D layouts has become increasingly important in fabricating microbatteries with high energy, high power density, and wide-ranging applications. In this review, Si-based 3D microbatteries and related fabrication technologies, especially the production of micro-lithium ion batteries, are reviewed and discussed in detail in order to provide guidance for the design and fabrication.

关键词： three-dimensional (3D) wafer-scale Si-based anode micro-LIBs thin-film deposition

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Special issue: Technologies for future high-efficiency industrial silicon wafer solar cells

《能源前沿（英文）》 2017年第11卷第1期页码 1-3 doi: 10.1007/s11708-016-0436-4

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Patterned wafer bonding using ultraviolet adhesive

Rui ZHUO, Guanglan LIAO, Wenliang LIU, Lei NIE, Tielin SHI

《机械工程前沿（英文）》 2011年第6卷第2期页码 214-218 doi: 10.1007/s11465-011-0130-5

摘要：

The process of patterned wafer bonding using ultraviolet (UV) adhesive as the intermediate layer was studied. By presetting the UV adhesive guide-layer, controlling the thickness of the intermediate layer (1– 1.5 μm), appropriate pre-drying temperature (60°C), and predrying time (6 min), we obtained the intermediate layer bonding of patterned quartz/quartz. Experimental results indicate that patterned wafer bonding using UV adhesive is achieved under room temperature. The process also has advantages of easy operation, low cost, and no plugging or leakage in the patterned area after bonding. Using the process, a microfluidic chip for red blood cell counting was designed and fabricated. Patterned wafer bonding using UV adhesive will have great potential in the fabrication of microfluidic chips.

关键词： ultraviolet (UV) adhesive intermediate layer patterned wafer bonding

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Effects of taping on grinding quality of silicon wafers in backgrinding

Zhigang DONG, Qian ZHANG, Haijun LIU, Renke KANG, Shang GAO

《机械工程前沿（英文）》 2021年第16卷第3期页码 559-569 doi: 10.1007/s11465-020-0624-0

摘要： Taping is often used to protect patterned wafers and reduce fragmentation during backgrinding of silicon wafers. Grinding experiments using coarse and fine resin-bond diamond grinding wheels were performed on silicon wafers with tapes of different thicknesses to investigate the effects of taping on peak-to-valley (PV), surface roughness, and subsurface damage of silicon wafers after grinding. Results showed that taping in backgrinding could provide effective protection for ground wafers from breakage. However, the PV value, surface roughness, and subsurface damage of silicon wafers with taping deteriorated compared with those without taping although the deterioration extents were very limited. The PV value of silicon wafers with taping decreased with increasing mesh size of the grinding wheel and the final thickness. The surface roughness and subsurface damage of silicon wafers with taping decreased with increasing mesh size of grinding wheel but was not affected by removal thickness. We hope the experimental finding could help fully understand the role of taping in backgrinding.

关键词： taping silicon wafer backgrinding subsurface damage surface roughness

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MEMS-based thermoelectric infrared sensors: A review

Dehui XU, Yuelin WANG, Bin XIONG, Tie LI

《机械工程前沿（英文）》 2017年第12卷第4期页码 557-566 doi: 10.1007/s11465-017-0441-2

摘要：

In the past decade, micro-electromechanical systems (MEMS)-based thermoelectric infrared (IR) sensors have received considerable attention because of the advances in micromachining technology. This paper presents a review of MEMS-based thermoelectric IR sensors. The first part describes the physics of the device and discusses the figures of merit. The second part discusses the sensing materials, thermal isolation microstructures, absorber designs, and packaging methods for these sensors and provides examples. Moreover, the status of sensor implementation technology is examined from a historical perspective by presenting findings from the early years to the most recent findings.

关键词： thermoelectric infrared sensor CMOS-MEMS thermopile micromachining wafer-level package

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Structure controlling and process scale-up in the fabrication of nanomaterials

Chunzhong LI,

《化学科学与工程前沿（英文）》 2010年第4卷第1期页码 18-25 doi: 10.1007/s11705-009-0305-3

摘要： Nanotechnology is already having a significant commercial impact, and will very certainly have a much greater impact in the future. The research on process engineering and scale-up will be very important for the commercial production and application of nanomaterials, because the properties and structure of nanomaterials are not only determined by the nucleation and growth process, but also strongly affected by the engineering properties, such as the mixing, the heat and mass transfer, and also the distribution of temperature, concentration, etc. This paper will present some research work in our laboratory on the fabrication of nanomaterials. Based on the chemical engineering principle and methods, many kinds of novel nanomaterials can be synthesized and their structure can be easily controlled through adjusting the parameters of the fluid mixing, and the distribution of temperature, residence time and concentration, etc. By using the micro-mixing, heat and mass transfer and reaction control methods, the host-guest nanocomposites have been assembled and assumed as the novel electroanalytical sensing nanobiocomposite materials. Based on the principles of chemical engineering, the manufacturing technologies for magnetic powders, calcium carbonate, and titanium dioxide have been developed for commercial-scale production, and the largest production scale has reached 15 kt/year.

关键词： scale-up significant commercial electroanalytical engineering laboratory

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Large-scale App privacy governance

《工程管理前沿（英文）》页码 640-652 doi: 10.1007/s42524-022-0228-y

摘要： Recently, the problem of mobile applications (Apps) leaking users’ private information has aroused wide concern. As the number of Apps continuously increases, effective large-scale App governance is a major challenge. Currently, the government mainly filters out Apps with potential privacy problems manually. Such approach is inefficient with limited searching scope. In this regard, we propose a quantitative method to filter out problematic Apps on a large scale. We introduce Privacy Level (P-Level) to measure an App’s probability of leaking privacy. P-Level is calculated on the basis of Permission-based Privacy Value (P-Privacy) and Usage-based Privacy Value (U-Privacy). The former considers App permission setting, whereas the latter considers App usage. We first illustrate the privacy value model and computation results of both values based on real-world dataset. Subsequently, we introduce the P-Level computing model. We also define the P-Level computed on our dataset as the PL standard. We analyze the distribution of average usage and number of Apps under the levels given in the PL standard, which may provoke insights into the large-scale App governance. Through P-Privacy, U-Privacy, and P-Level, potentially problematic Apps can be filtered out efficiently, thereby making up for the shortcoming of being manual.

关键词： privacy risk Privacy Level quantification large-scale App governance

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On the added value of multi-scale modeling of concrete

《结构与土木工程前沿（英文）》 2022年第16卷第1期页码 1-23 doi: 10.1007/s11709-021-0790-0

摘要： This review of the added value of multi-scale modeling of concrete is based on three representative examples. The first one is concerned with the analysis of experimental data, taken from four high-dynamic tests. The structural nature of the high-dynamic strength increase can be explained by using a multi-scale model. It accounts for the microstructure of the specimens. The second example refers to multi-scale thermoelastic analysis of concrete pavements, subjected to solar heating. A sensitivity analysis with respect to the internal relative humidity (RH) of concrete has underlined the great importance of the RH for an assessment of the risk of microcracking of concrete. The third example deals with multi-scale structural analysis of a real-scale test of a segmental tunnel ring. It has turned out that multi-scale modeling of concrete enables more reliable predictions of crack opening displacements in tunnel segments than macroscopic models taken from codes of practice. Overall, it is concluded that multi-scale models have indeed a significant added value. However, its degree varies with these examples. In any case, it can be assessed by means of a comparison of the results from three sources, namely, multi-scale structural analysis, conventional structural analysis, and experiments.

关键词： experiments multi-scale analysis conventional structural analysis concrete reinforced concrete

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Large Scale Infrastructure Projects: The Art of Project or Change Management?

Geert Letens,Kurt Verweire,Peter De Prins

《工程管理前沿（英文）》 2016年第3卷第3期页码 197-202 doi: 10.15302/J-FEM-2016033

摘要： Although it is generally understood that change is a fundamental component of managing projects in the construction industry in general and an inevitable challenge for large scale infrastructure project in particular, there has been little to no attention in the literature to understand change in this context from a more holistic perspective. For this purpose, this work looks at change through the eyes of a framework of six batteries of change that seem essential to charge an organization’s capabilities for change. The framework brings together the expertise of four specialists that all have developed their insights over many years of study and practice, and has been validated through an extensive review of the management literature on organization development and change. Reflections on the application of this model in the construction industry and in large scale infrastructure projects demonstrate that energizing organizations to successfully deal with change goes beyond the traditional techniques of managing change from a program or project management perspective. Assessing the six batteries of change in this context can help organizations to develop capabilities for change that build change energy by balancing formal/rational methods with informal/emotional interventions at both a local (department/subproject) and global (business) level.

关键词： large scale project management organization development and change batteries of change model

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Large-scale model test study on the water pressure resistance of construction joints of karst tunnel

《结构与土木工程前沿（英文）》页码 1249-1263 doi: 10.1007/s11709-023-0974-x

摘要： Model tests and numerical calculations were adopted based on the New Yuanliangshan tunnel project to investigate the water pressure resistance of lining construction joints in high-pressure and water-rich karst tunnels. A large-scale model test was designed and conducted, innovatively transforming the external water pressure of the lining construction joint into internal water pressure. The effects of the embedded position and waterstop type on the water pressure resistance of the construction joint were analyzed, and the reliability of the model test was verified via numerical calculations. The results show that using waterstops can significantly improve the water pressure resistance of lining construction joints. The water pressure resistance of the lining construction joint is positively correlated with the lining thickness and embedded depth of the waterstop. In addition, the type of waterstop significantly influences the water pressure resistance of lining construction joints. The test results show that the water pressure resistance of the embedded transverse reinforced waterstop is similar to that of the steel plate waterstop, and both have more advantages than the rubber waterstop. The water pressure resistance of the construction joint determined via numerical calculations is similar to the model test results, indicating that the model test results have high accuracy and reliability. This study provides a reference for similar projects and has wide applications.

关键词： karst tunnel lining construction joint water pressure resistance large-scale model test numerical calculations

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Eddy current measurement of the thickness of top Cu film of the multilayer interconnects in the integrated circuit (IC) manufacturing process

Zilian QU,Yonggang MENG,Qian ZHAO

《机械工程前沿（英文）》 2015年第10卷第1期页码 1-6 doi: 10.1007/s11465-015-0325-2

摘要：

This paper proposes a new eddy current method, named equivalent unit method (EUM), for the thickness measurement of the top copper film of multilayer interconnects in the chemical mechanical polishing (CMP) process, which is an important step in the integrated circuit (IC) manufacturing. The influence of the underneath circuit layers on the eddy current is modeled and treated as an equivalent film thickness. By subtracting this equivalent film component, the accuracy of the thickness measurement of the top copper layer with an eddy current sensor is improved and the absolute error is 3 nm for sampler measurement.

关键词： CMP eddy current multilayer wafer Cu interconnects equivalent unit

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Stabilization treatment of contaminated soil: a field-scale application in Shanghai, China

Changbo ZHANG, Qishi LUO, Chunnu GENG, Zhongyuan LI

《环境科学与工程前沿（英文）》 2010年第4卷第4期页码 395-404 doi: 10.1007/s11783-010-0271-5

摘要： Stabilization is one of the best demonstrated available technologies for treating toxic pollutants in soils and has been used worldwide but is rarely used for treatment of contaminated sites in China despite many bench-scale studies. Here, a field-scale application of stabilization treatment in Shanghai, China was summarized to demonstrate the whole engineering process and the key technical issues regarding stabilization of contaminated soil. A site contaminated with arsenic (As) and polycyclic aromatic hydrocarbons (PAHs), formerly used as a lighting plant in Shanghai, was chosen as the demonstration site. Stabilizing measures were taken to treat the contaminated soil to reuse the site for residential purposes. The whole engineering remediation process consisted of phase I environmental site assessment (ESA) and phase II ESA, quantitative human health risk assessment, remediation alternatives evaluation, bench-scale testing, remedial design, engineering implementation, and post-remediation assessment. A third party conducted evaluation monitoring indicated desirable results were achieved via the stabilization treatment. In addition, some technical obstacles related to soil stabilization treatment were discussed, including soil quality evaluation, stabilization effectiveness validation, and soil reuse assessment.

关键词： stabilization contaminated soil field-scale demonstration technical obstacles

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我国半导体硅片发展现状与展望

张果虎,肖清华,马飞

《中国工程科学》 2023年第25卷第1期页码 68-78 doi: 10.15302/J-SSCAE-2023.01.002

摘要：

硅片是半导体关键的基础材料，我国半导体硅片对外依存度较高，增强硅片的自主保障能力，对提升我国半导体产业整体水平至关重要。本文重点围绕市场主流的8 in、12 in硅片，分析了全球半导体硅片的技术和产业发展现状，研判了全球半导体硅片产业未来的发展趋势，重点分析了我国半导体硅片的发展现状，指出我国半导体硅片在当前市场需求、宏观政策、配套能力、研发投入等利好因素下迎来难得的发展机遇，同时提出我国半导体硅片产业发展面临挑战，在此基础上，从进一步加强顶层设计和宏观规划、强化政策落实和政策持续性、协调支持产业链协同发展、布局研发集成电路先进制程用半导体硅片等方面提出对策建议，以期为推动我国半导体硅片向更高质量发展提供参考。

关键词：半导体硅片；8 in；12 in；产业协同；先进制程

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Investigation on the integral output power model of a large-scale wind farm

BAO Nengsheng, MA Xiuqian, NI Weidou

《能源前沿（英文）》 2007年第1卷第1期页码 67-78 doi: 10.1007/s11708-007-0006-x

摘要： The integral output power model of a large-scale wind farm is needed when estimating the wind farm s output over a period of time in the future. The actual wind speed power model and calculation method of a wind farm made up of many wind turbine units are discussed. After analyzing the incoming wind flow characteristics and their energy distributions, and after considering the multi-effects among the wind turbine units and certain assumptions, the incoming wind flow model of multi-units is built. The calculation algorithms and steps of the integral output power model of a large-scale wind farm are provided. Finally, an actual power output of the wind farm is calculated and analyzed by using the practical measurement wind speed data. The characteristics of a large-scale wind farm are also discussed.

关键词： power model actual energy large-scale practical measurement