Robust control of

2009, Volume 4, Issue 1

Abstract

Keywords

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Frontiers of Mechanical Engineering >> 2009, Volume 4, Issue 1 doi: 10.1007/s11465-009-0004-2

Robust control of

School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore

Available online: 2009-03-05

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Abstract

This article describes the development of an flexure-based micromanipulator, with the features of decoupled kinematic structure, large motion range, high positioning precision, and fast response. The large motion range of flexure mechanisms is quantified by a given definition. Based on the given definition, large motion is achieved in the mechanical design of the -flexure parallel mechanism (FPM). To ensure high positioning precision and fast dynamic response, a hybrid control algorithm with both position control and vibration control are designed, using the H -theory. The controller strongly solves the three common problems of flexure mechanisms simultaneously, including unmodeled uncertainties, the external disturbances and vibration caused by inherent low damping.

Keywords

robust control ; flexure mechanisms ; flexure-based micromanipulator

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