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Frontiers of Mechanical Engineering >> 2017, Volume 12, Issue 4 doi: 10.1007/s11465-017-0424-3

Development and application of high-end aerospace MEMS

Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Xi’an 710072, China; Key Laboratory of Micro/Nano Electromechanical Systems, Xi’an 710072, China; Department of Microsystem Engineering, Northwestern Polytechnical University, Xi’an 710072, China

Accepted: 2017-03-24 Available online: 2017-10-31

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Abstract

This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.

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