2017, Volume 12, Issue 4
Frontiers of Mechanical Engineering >> 2017, Volume 12, Issue 4 doi: 10.1007/s11465-017-0447-9
Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure
1. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China.
2. School of Mechanical and Manufacturing Engineering, University of New South Wales, Sydney, NSW 2052, Australia.
3. Shaanxi Institute of Metrology Science, Xi’an 710065, China
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Abstract
A novel micro-electromechanical systems piezoresistive pressure sensor with a diagonally positioned peninsula-island structure has high sensitivity for ultra-low-pressure measurement. The pressure sensor was designed with a working range of 0–500 Pa and had a high sensitivity of 0.06 mV·V−1·Pa−1. The trade-off between high sensitivity and linearity was alleviated. Moreover, the influence of the installation angle on the sensing chip output was analyzed, and an application experiment of the sensor was conducted using the built pipettor test platform. Findings indicated that the proposed pressure sensor had sufficient resolution ability and accuracy to detect the pressure variation in the pipettor chamber. Therefore, the proposed pressure sensor has strong potential for medical equipment application.
Keywords
MEMS ; low pressure sensor ; peninsula-island ; ultra-high sensitivity ; medical application
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