2017, Volume 12, Issue 4
Frontiers of Mechanical Engineering >> 2017, Volume 12, Issue 4 doi: 10.1007/s11465-017-0462-x
Fabrication of Si-based three-dimensional microbatteries: A review
1. Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China.
2. Department of Mechanical Engineering, University of California, Berkeley, CA 94720, USA
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Abstract
High-performance, Si-based three-dimensional (3D) microbattery systems for powering micro/nano-electromechanical systems and lab-on-chip smart electronic devices have attracted increasing research attention. These systems are characterized by compatible fabrication and integratibility resulting from the silicon-based technologies used in their production. The use of support substrates, electrodes or current collectors, electrolytes, and even batteries used in 3D layouts has become increasingly important in fabricating microbatteries with high energy, high power density, and wide-ranging applications. In this review, Si-based 3D microbatteries and related fabrication technologies, especially the production of micro-lithium ion batteries, are reviewed and discussed in detail in order to provide guidance for the design and fabrication.
Keywords
three-dimensional (3D) ; wafer-scale ; Si-based anode ; micro-LIBs ; thin-film deposition
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