Frontiers of Mechanical Engineering >> 2017, Volume 12, Issue 4 doi: 10.1007/s11465-017-0492-4
Special issue: Micro-electromechanical systems (MEMS)
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Collaborative Innovation Center of Suzhou Nano Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China.
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