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Frontiers of Chemical Science and Engineering >> 2019, Volume 13, Issue 3 doi: 10.1007/s11705-019-1831-2

Improvement in growth yield of single-walled carbon nanotubes with narrow chirality distribution by pulse plasma CVD

. Department of Electronic Engineering, Tohoku University, Sendai 980-8579, Japan.. Japan Science and Technology Agency (JST)-PRESTO, Sendai 980-8579, Japan

Accepted: 2019-07-30 Available online: 2019-07-30

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A pulse plasma chemical vapor deposition (CVD) technique was developed for improving the growth yield of single-walled carbon nanotubes (SWNTs) with a narrow chirality distribution. The growth yield of the SWNTs could be improved by repetitive short duration pulse plasma CVD, while maintaining the initial narrow chirality distribution. Detailed growth dynamics is discussed based on a systematic investigation by changing the pulse parameters. The growth of SWNTs with a narrow chirality distribution could be controlled by the difference in the nucleation time required using catalysts comprising relatively small or large particles as the key factor. The nucleation can be controlled by adjusting the pulse on/off time ratio and the total processing time.

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