Frontiers of Information Technology & Electronic Engineering
>> 2017,
Volume 18,
Issue 5
doi:
10.1631/FITEE.1500454
Article
Micro-angle tilt detection for the rotor of a novel rotational gyroscopewith a 0.47’’ resolution
. MEMS Center, Harbin Institute of Technology, Harbin 150001, China.. MOE Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Harbin 150001, China
Available online: 2017-06-22
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Abstract
Differential capacitive detection has been widely used in the displacement measurement of the proof mass of vibratory gyroscopes, but it did not achieve high resolutions in angle detection of rotational gyroscopes due to restrictions in structure, theory, and interface circuitry. In this paper, a differential capacitive detection structure is presented to measure the tilt angle of the rotor of a novel rotational gyroscope. A mathematical model is built to study how the structure’s capacitance changes with the rotor tilt angles. The relationship between differential capacitance and structural parameters is analyzed, and preliminarily optimized size parameters are adopted. A lownoise readout interface circuit is designed to convert differential capacitance changes to voltage signals. Rate table test results of the gyroscope show that the smallest resolvable tilt angle of the rotor is less than 0.47’’ (0.00013 ), and the nonlinearity of the angle detection structure is 0.33%, which can be further improved. The results indicate that the proposed detection structure and the circuitry are helpful for a high accuracy of the gyroscope.
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