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2018, Volume 19, Issue 6

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Frontiers of Information Technology & Electronic Engineering >> 2018, Volume 19, Issue 6 doi: 10.1631/FITEE.1601692

A general method of designing phase-shifting algorithms for grating lateral shearing interferometry

. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.. University of Chinese Academy of Sciences, Beijing 100039, China.

Available online: 2018-08-30
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Abstract

We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method, four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method.

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