Frontiers of Information Technology & Electronic Engineering
>> 2022,
Volume 23,
Issue 5
doi:
10.1631/FITEE.2100236
Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces
Affiliation(s): Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China; Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China; less
Received: 2021-05-12
Accepted: 2022-05-19
Available online: 2022-05-19
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Abstract
We propose an inductor-capacitor (LC) wireless passive , which eliminates the difficulty in measuring the acceleration on the surface of a bending structure. The accelerometer is composed of a flexible polyimide (PI) substrate and a planar spiral inductance coil (thickness 300 nm), made using . It can be bent or folded at will, and can be attached firmly to the surface of objects with a bending structure. The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna. Compared with other accelerometers with a lead wire, the accelerometer can prevent the lead from falling off in the course of vibration, thereby prolonging its service life. Through establishment of an experimental platform, when the distance between the antenna and accelerometer was 5 mm, the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20‒100 m/s. The results indicate that the acceleration and peak-to-peak output voltage were nearly linear, with accelerometer sensitivity reaching 0.27 mV/(m·s). Moreover, the maximum error of the accelerometer was less than 0.037%.
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