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Frontiers of Information Technology & Electronic Engineering >> 2015, Volume 16, Issue 6 doi: 10.1631/FITEE.1400349
A combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer
Micro-Satellite Research Center, Zhejiang University, Hangzhou 310027, China
Abstract
Keywords
Bias drift ; Closed-loop MEMS accelerometer ; Modulated feedback approach ; Temperature compensation
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