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Frontiers of Mechanical Engineering >> 2007, Volume 2, Issue 2 doi: 10.1007/s11465-007-0023-9
Theoretical and experimental analysis on super precision grinding of monocrystal silicon
Key Laboratory for Precision & Non-traditional Machining of Ministry of Education, Dalian University of Technology, Dalian 116021, China
Abstract
Keywords
machining mechanism ; recovery ; advancement ; mechanism ; subsurface
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