2003, Volume 5, Issue 1
Strategic Study of CAE >> 2003, Volume 5, Issue 1
Nano-measuring Instruments and Nano-machining Technology
Beijing Scientific Instrument Research and Development Center, Chinese Academy of Sciences, Beijing 100080, China
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Abstract
Nanotechnology is a research and development hot spot nowadays. In this paper a short introduction of nanoscience and nanotechnology was given. Nano-measurement and nano-machining play a very important and key role in the nanoscience and nanotechnology. Conventional electron microscope is a major nano-measuring instrument. Newly developed scanning probe microscope and focused ion beam-electron beam (dual beam) equipment are two types of powerful nano-measuring instruments and nano-machining tools. Its present state, prospect and market in the world as well as in China were described briefly.
The first-two Chinese prototype transmission electron microscopes were constructed in 1958-1959 in Changchun Institute of Optics and Fine Mechanics, CAS. Beijing Scientific Instrument R & D Center (KYKY) developed the first domestic scanning electron microscope. According to a survey in 1996-1997 there were 1 921 electron microscopes including 756 transmission electron microscopes (TEM) and 1 165 scanning electron microscopes (SEM) in China at that time. Of these 1 921 TEMs and SEMs, 1006 were domestic production (mostly medium-and low-grade electron microscopes) accounting for 52.4 % of the market, and 915 instruments were imported (47.6 %). Beijing Scientific Instrument R & D Center, CAS (KYKY Technology Development LTD) , Shanghai electron-Optical Technology Research Institute and Jiangnan Optical Instrument Plant produced more than 95 % of these 1 006 home-made electron microscopes. The first domestic scanning tunneling microscope (STM) was completed in 1987 in Beijing Open Laboratory of Electron Microscopy under CAS. Since then more than one hundred scanning probe microscopes of various types have been constructed in China. The Chinese electron microscope and scanning probe microscope production should be improved and enlarged to cover the progressively increasing demand of research and development work in China.
Keywords
nanotechnology ; nano-measurement ; nano-machining ; electron microscope ; scanning probe microscope ; focused ion beam-electron beam (dual beam) equipment ; instrumentation
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References
[ 1 ] 宗 和.芯片:进入010微米竞赛[N].解放日报, 2002-04-22
[ 2 ] 姚骏恩.扫描隧道显微镜[A].姚骏恩主编.生物化学仪器指南 (第四册) ———扫描隧道显微镜、电子显微镜及有关设备[C].北京:科学出版社, 1992.1～15
[ 3 ] YaoJE , HeJ , ShangGY , etal.Scanningtunnelingmicroscopeanditsbiologicalapplications[A].In:KuoKH , YaoJE , Eds.Internsymponelectronmicroscopy[C].Beijing, China, Oct22～23, 1990.Singapore, NewJersey:WorldScientificPub, 1991.81～95
[ 4 ] 张亦奕, 贺 节, 姚骏恩, 等.原子力显微术[J].电子显微学报, 1995, 14 (2) :142～146 link1
[ 5 ] 张立德.纳米测量学的发展与展望[J].现代科学仪器, 1998, (1/2) :30～33 link1
[ 6 ] 姚骏恩.电子显微镜的现状与展望[J].电子显微学报, 1998, 17 (6) :767～776 link1
[ 7 ] HiranoH .FactorspromotingresearchanddevelopmentinelectronmicroscopyinJapan[J].JEOLNews (ElectronOpticsInstrumentation) , 1999, 34E (1) :8～9
[ 8 ] OnoA .DevelopmentofelectronopticaltechnologyforJEOL’selectronprobeinstruments[J].JEOLNews (ElectronOpticsInstrumentation) , 1999, 34E (1) :64～66
[ 9 ] 郭可信.晶体电子显微学与诺贝尔奖[J].电子显微学报, 1983, 2 (2) :1～6 link1
[10] 姚骏恩.通向微观世界之路———电子显微镜与扫描隧道显微镜的诞生[A].陈建礼主编.科学的丰碑———20世纪重大科技成就纵览[C].济南:山东科学技术出版社, 1998.410～415 link1
[11] 庞世谨.原子操纵的进展[J].现代科学仪器, 1998, (1/2) :44～48 link1
[12] 傅惠南.应用SPM技术开展纳米切削加工[J].电子显微学报, 2001, 20 (5) :615～619 link1
[13] 姚骏恩.我国超显微镜的研制与发展[J].电子显微学报, 1996, 15 (2) :350～370 link1
[14] 金鹤鸣, 姜新力, 姚骏恩.中国电子显微分析仪器市场[A].国家科委条件司, 中国分析测试协会.分析仪器市场调查与分析 (第四章) [C].北京:海洋出版社, 1998.112～150
[15] YaoJun en.DevelopmentandproductionofelectronmicroscopesinChina:Ahistoricalsurvey[J].电子显微学报, 2002, 21 (3) :354～367
[16] 姚骏恩.自强是真理[N].科学时报, 2000-08-01 (B)
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