2004, Volume 6, Issue 9
Strategic Study of CAE >> 2004, Volume 6, Issue 9
Large Scale Scanning Probe Microscope
1. Research Center for Intelligent Transportation Systems , Southeast University , Nanjing 210096 , China
2. Key Laboratory of Molecular and Biomolecular Electronics of MOE , Southeast University , Nanjing 210096 , China
Next Previous
Abstract
This paper introduces a type of large scale scanning probe microscope, which adopts the scheme of the separation of large scale scanning from high precise scanning, and the separation of X - Y scanning from vertical detection. The instrument has the advantages such as good repeatability, large scanning scale as well as high resolution. The large scale scanning range is 220 mm × 290 mm × 60 mm and the repeatability is 2～3/μm. The instrument achieves the auto-feeding of the probe, the auto-focusing of the optical microscope and the auto-mosaicking of the scanning image.
Keywords
scanning probe microscope ; auto-feeding ; auto-focusing ; image mosaicking
Figures
图1
图2
图3
图4
图5
图6
图7
图8
图9
References
[ 1 ] BinningG , RoherH , GerberC , etal.Surfacestudiesbyscanningtunnelingmicroscopy[J].PhysRevLett, 1982, 49 (1) :57～61
[ 2 ] 白春礼.扫描隧道显微术及其应用[M ].上海:上海科学技术出版社, 1992 link1
[ 3 ] 于 为, 郁道银.医学超声图像的处理与拼接[J].中国生物医学工程学报, 1997, 16 (3) :253～257 link1
[ 4 ] CastlemanKR .Digitalimageprocessing[M ].Beijing:TsinghuaUniversityPress, 1998
京公网安备 11010502051620号
