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Frontiers of Mechanical Engineering >> 2019, Volume 14, Issue 3 doi: 10.1007/s11465-019-0538-x
Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages
State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China
Abstract
Keywords
nano-precision positioning stage ; analysis and design ; structural and dynamic parameters ; dynamic accuracy ; systematic modeling
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