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Frontiers of Mechanical Engineering >> 2020, Volume 15, Issue 4 doi: 10.1007/s11465-020-0589-z
Evaluation of measurement uncertainty of the high-speed variable-slit system based on the Monte Carlo method
Centre of Ultra-precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, China; Key Lab?of?Ultra-Precision?? Intelligent?? Instrumentation?? (Harbin?? Institute??of??Technology), Ministry of Industry and Information Technology, Harbin 150080, China
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Keywords
air-floating guide rail ; error transfer model ; driving and following structure ; dynamic error ; uncertainty evaluation ; Monte Carlo method
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