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Frontiers of Mechanical Engineering >> 2020, Volume 15, Issue 4 doi: 10.1007/s11465-020-0599-x
Crystallographic orientation effect on cutting-based single atomic layer removal
. Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin), University College Dublin, Dublin 4, Ireland.. State Key Laboratory of Precision Measuring Technology and Instruments, Centre of Micro/Nano Manufacturing Technology (MNMT), Tianjin University, Tianjin 300072, China
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Keywords
ACSM ; single atomic layer removal mechanism ; crystallographic orientation effect ; mechanical cutting ; Manufacturing III
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