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Frontiers of Mechanical Engineering >> 2021, Volume 16, Issue 1 doi: 10.1007/s11465-020-0602-6
Development of surface reconstruction algorithms for optical interferometric measurement
. Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin), University College Dublin, Dublin 4, Ireland.. SchoolofControlEngineering,NortheasternUniversityatQinhuangdao,Qinhuangdao 066004, China.. StateKeyLaboratoryofPrecisionMeasuringTechnologyand Instruments, Centre of Micro/Nano Manufacturing Technology (MNMT), Tianjin University, Tianjin 300072, China
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Keywords
surface topography ; measurement ; optical interferometry ; coherence envelope ; phase-shifting algorithm
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