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MEMS Sensors

MEMS Sensors 2 articles

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A MEMS Micro Force Sensor Based on a Laterally Movable Gate Field-Effect Transistor (LMGFET) with a Novel Decoupling Sandwich Structure Article

Wendi Gao, Zhixia Qiao, Xiangguang Han, Xiaozhang Wang, Adnan Shakoor, Cunlang Liu, Dejiang Lu, Ping Yang, Libo Zhao, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang, Dong Sun

Engineering 2023, Volume 21, Issue 2,   Pages 61-74 doi:10.1016/j.eng.2022.06.018

Abstract 142 PDF 60

Record-Breaking Frequency of 44 GHz Based on the Higher Order Mode of Surface Acoustic Waves with LiNbO3/SiO2/SiC Heterostructures Article

Jian Zhou,Dinghong Zhang,Yanghui Liu,Fengling Zhuo,Lirong Qian,Honglang Li,Yong-Qing Fu,Huigao Duan

Engineering 2023, Volume 20, Issue 1,   Pages 112-119 doi:10.1016/j.eng.2022.05.003

Abstract 204 PDF 95