A MEMS Micro Force Sensor Based on a Laterally Movable Gate Field-Effect Transistor (LMGFET) with a Novel Decoupling Sandwich Structure
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Wendi Gao, Zhixia Qiao, Xiangguang Han, Xiaozhang Wang, Adnan Shakoor, Cunlang Liu, Dejiang Lu, Ping Yang, Libo Zhao, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang, Dong Sun
Engineering
2023,
Volume 21,
Issue 2,
Pages 61-74
doi:10.1016/j.eng.2022.06.018
Abstract
142
PDF
60
Record-Breaking Frequency of 44 GHz Based on the Higher Order Mode of Surface Acoustic Waves with LiNbO3/SiO2/SiC Heterostructures
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Jian Zhou,Dinghong Zhang,Yanghui Liu,Fengling Zhuo,Lirong Qian,Honglang Li,Yong-Qing Fu,Huigao Duan
Engineering
2023,
Volume 20,
Issue 1,
Pages 112-119
doi:10.1016/j.eng.2022.05.003
Abstract
204
PDF
95