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Frontiers of Chemical Science and Engineering
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A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication
Athanasios Smyrnakis Angelos Zeniou Kamil Awsiuk Vassilios Constantoudis Evangelos Gogolides
plasma,nanoassembly,etching,nanodots,nanopillars,nanofabrication,
Frontiers of Chemical Science and Engineering
2019.13(3) 475-484
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