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High-Speed Parallel Plasmonic Direct-Writing Nanolithography Using Metasurface-Based Plasmonic Lens
Article
Yueqiang Hu Ling Li Rong Wang Jian Song Hongdong Wang Huigao Duan Jiaxin Ji Yonggang Meng
Nanofabrication, Surface plasmon polariton, Lithography, Plasmonic flying head, Plasmonic lens
Engineering
2021.7(11) 1623-1630
A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication
Athanasios Smyrnakis Angelos Zeniou Kamil Awsiuk Vassilios Constantoudis Evangelos Gogolides
plasma,nanoassembly,etching,nanodots,nanopillars,nanofabrication,
Frontiers of Chemical Science and Engineering
2019.13(3) 475-484
A review of the scalable nano-manufacturing technology for flexible devices
Wenbin HUANG Xingtao YU Yanhua LIU Wen QIAO Linsen CHEN
flexible nano-manufacturing,flexible devices,nanofabrication,scalability,
Frontiers of Mechanical Engineering
2017.12(1) 99-109
Mechanism and development of dip-pen nanolithography (DPN)
Jiang Hongkui Yao Tangwei Hu Liguang Shen Yaqiang Yu Xianwen
dip-pen , nanolithography , atomic force microscopy , nanofabrication
Strategic Study of CAE
2008.10(7) 173-179
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