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microfabrication 5

Microfabrication 2

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Powder-bed recoating 1

Selective laser melting 1

additive manufacturing 1

analysis chip 1

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electrochemical deposition 1

formic acid oxidation 1

fuel cell 1

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Additive direct-write microfabrication for MEMS: A review

Kwok Siong TEH

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4, Pages 490-509 doi: 10.1007/s11465-017-0484-4

Abstract: direct-write additive manufacturing offers extraordinary promises to revolutionize research and development in microfabricationlandscape of direct-write additive manufacturing techniques that are potentially applicable for MEMS microfabrication

Keywords： direct-write additive manufacturing microfabrication MEMS

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Development of Microfabrication Techniques for Production of Analysis Chip

Wei Shoushui,Zhang Yulin,Cui Dafu

Strategic Study of CAE 2004, Volume 6, Issue 10, Pages 90-94

Abstract: Some available methods of microfabrication for production of analysis chip were proposed.

Keywords： analysis chip microfabrication μ-TAS

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Prospects of Microsystems Research and Development

Zhong Xianxin

Strategic Study of CAE 2000, Volume 2, Issue 1, Pages 81-84

Abstract: transmission and processing technique, nanometer measurement and operation ,new microsystem materials, microfabrication

Keywords： microsystems microdomain sensing and processing nanometer measurement new materi-als microfabrication

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Micro-cantilever Electric Field Sensor Driven by Electrostatic Force Article

Zhifei Han, Jun Hu, Licheng Li, Jinliang He

Engineering 2023, Volume 24, Issue 5, Pages 184-191 doi: 10.1016/j.eng.2022.06.017

Abstract: The presented E-sensor is fabricated into a four-cantilever structure using microfabrication technology

Keywords： Microsensors Electric sensing devices Microfabrication Piezoresistive devices

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A Pt-Bi bimetallic nanoparticle catalyst for direct electro-oxidation of formic acid in fuel cells

Shu-Hong LI, Yue ZHAO, Jian CHU, Wen-Wei LI, Han-Qing YU, Gang LIU, Yang-Chao TIAN

Frontiers of Environmental Science & Engineering 2013, Volume 7, Issue 3, Pages 388-394 doi: 10.1007/s11783-012-0475-y

Abstract: Direct formic acid fuel cells are a promising portable power-generating device, and the development of efficient anodic catalysts is essential for such a fuel cell. In this work Pt-Bi nanoparticles supported on micro-fabricated gold wire array substrate were synthesized using an electrochemical deposition method for formic acid oxidation in fuel cells. The surface morphology and element components of the Pt-Bi/Au nanoparticles were characterized, and the catalytic activities of the three Pt-Bi/Au nanoparticle electrodes with different Pt/Bi ratios for formic acid oxidation were evaluated. It was found that Pt Bi /Au had a much higher catalytic activity than Pt Bi /Au and Pt Bi /Au, and Pt Bi /Au exhibited a current density of 2.7 mA·cm , which was 27-times greater than that of Pt/Au. The electro-catalytic activity of the Pt-Bi/Au electrode for formic acid oxidation increased with the increasing Bi content, suggesting that it would be possible to achieve an efficient formic acid oxidation on the low Pt-loading. Therefore, the Pt-Bi/Au electrode offers a promising catalyst with a high activity for direct oxidation of formic acid in fuel cells.

Keywords： catalyst electrochemical deposition formic acid oxidation fuel cell gold wire array microfabrication

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Development of Micro Selective Laser Melting: The State of the Art and Future Perspectives Review

Balasubramanian Nagarajan, Zhiheng Hu, Xu Song, Wei Zhai, Jun Wei

Engineering 2019, Volume 5, Issue 4, Pages 702-720 doi: 10.1016/j.eng.2019.07.002

Abstract:

Additive manufacturing (AM) is gaining traction in the manufacturing industry for the fabrication of components with complex geometries using a variety of materials. Selective laser melting (SLM) is a common AM technique that is based on powder-bed fusion (PBF) to process metals; however, it is currently focused only on the fabrication of macroscale and mesoscale components. This paper reviews the state of the art of the SLM of metallic materials at the microscale level. In comparison with the direct writing techniques that are commonly used for micro AM, micro SLM is attractive due to a number of factors, including a faster cycle time, process simplicity, and material versatility. A comprehensive evaluation of various research works and commercial systems for the fabrication of microscale parts using SLM and selective laser sintering (SLS) is conducted. In addition to identifying existing issues with SLM at the microscale, which include powder recoating, laser optics, and powder particle size, this paper details potential future directions. A detailed review of existing recoating methods in powder-bed techniques is conducted, along with a description of emerging efforts to implement dry powder dispensing methods in the AM domain. A number of secondary finishing techniques for AM components are reviewed, with a focus on implementation for microscale features and integration with micro SLM systems.

Keywords： Additive manufacturing Selective laser melting Microfabrication Hybrid processing Powder-bed recoating