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Research on Microelectromagnetic Relays
LI De-sheng, LIU Ben-dong
Frontiers of Mechanical Engineering 2006, Volume 1, Issue 1, Pages 111-114 doi: 10.1007/s11465-005-0013-8
A new microelectromagnetic relay is presented and fabricated based on micromachining technology, aimingA microelectromagnetic relay is fabricated and the initial test results are given.
Keywords: sacrifice-layer technology OFF complete microelectromagnetic Electromagnetic
Title Author Date Type Operation