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Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning

Ruizhou WANG, Xianmin ZHANG

Frontiers of Mechanical Engineering 2015, Volume 10, Issue 1, Pages 20-36 doi: 10.1007/s11465-015-0328-z

Abstract: This paper presents a novel external preload mechanism and tests it in a 1-degree of freedom (1-DOF)The values of the preload displacement, actual input displacement and output displacement can be measuredThe test results show the preload characteristics vary with different types or control modes of the PPCASome fitting formulas are derived to describe the preload displacement, actual input displacement andWith the identification of the preload characteristics, the actual and comprehensive output characteristics

Keywords： nanopositioning preload characteristic packaged piezoelectric ceramic actuator compliant mechanism