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Piezoelectric film-actuated motion platform with high resolution
HUA Shunming, ZHANG Hongzhuang, CHENG Guangming, FAN Zunqiang, LIU Jianfang
Frontiers of Mechanical Engineering 2008, Volume 3, Issue 3, Pages 265-269 doi: 10.1007/s11465-008-0041-2
Keywords: mathematical stick-slip mechanism piezoelectric film-actuated analysis terrific
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