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2006年 第1卷 第3期

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《机械工程前沿（英文）》 >> 2006年 第1卷 第3期 doi: 10.1007/s11465-006-0036-9

Research on the control systems of a precision linear motor drive device

Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China;

发布日期： 2006-09-05
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The model of a precision linear motor drive device (PLMDD) and its control requirements are analyzed. In order to enhance the tracking and anti-disturbance performance of the system, its third-order model is established, and disturbance-observer based input revising feedforward error compensation robust control algorithm, combined with integral-separated proportional integral derivative (PID) control algorithm is proposed. This includes feedback control algorithm and feedforward control algorithm. The feedback controller improves system tracking performance and suppresses load and mechanical disturbance while the feedforward controller compensates phase hysteresis introduced by feedback control. Theoretical analyses, simulations and experiments show that this control method increases the tracking precision of PLMDD from ±5 μm to ±2 μm and dramatically improves its anti-disturbance ability.

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